VMZ Zenith Video Measuring Machine

VMZ Zenith Video Measuring Machine with a sub-micron accuracy, is designed specially for high accuracy measurement scenarios like semiconductor, microassembly and optical communication.

Description

Features

  • Optional microscope lens with high magnification of 25-6360x
  • Programmable surface light, profile light and coaxial light, available illumination configuration to meet different applications
  • Several optional optics for various measuring requirements
  • Application of nanoscale ultra-low expansion coefficient scale, ensuring high precision and stability
  • Granite structure provides high precision and stability
  • Optional chromatic confocal sensor

Specification

ModelVMZ432-T1VMZ432-T2VMZ432-T3
Travel(mm)400 x 300 x 200[1]
External Dimensions (mm)800 x 1240 x 1762
Mass (kg)420450
Max. Stage Loading (kg)25
OpticsAuto zoom lensMicroscope lensAuto zoom lensMicroscope lens
Magnification[2]25-338x1131x /2829x52-680x
Measuring Range(mm)Single lens380 x 300
Lens coincidence325 x 300
Accuracy[3](µm)X/Y linearE1=(0.7+L/300)
XY areaE2=(0.8+L/300)
Z linearE1=(2.8+L/300)E1=(2.8+L/150)E1=(0.9+L/150)E1=(2.8+L/150)
IlluminationProfileLED cold light, 256 brightness adjustable
SurfaceProgrammable 6 rings 8 segments LED cold light 256 brightness adjustableLED cold light 256 brightness adjustableLED cold light 256 brightness adjustable
CoaxialLED cold light, 256 brightness adjustable
CameraHigh definition industrial color digital camera
Drive system4-axis CNC servo control system
Speed (mm/s)XY100
Z50
GuideUltra high precision linear guide rail
Scale0.01 µm ultra-high precision scale
The Min Unit (µm)0.01
Image ProcessingAdvanced TZTEK image processing method: 256 gray level, 20:1 sub- pixel processing technology
SoftwareVispec (VMZ Version)
EnvironmentTemperature20°C±2°C, Humidity 30-80%
Vibration<0.002 g, below 15 Hz
Power200-240 vac, 50/60 Hz, 1 phase, 700 W
  • [1] Customizable for other travel range.
  • [2] Magnification is approximate and depends on the size and resolution of the monitor.
  • [3] L is the measured length in mm, determined by TZTEK’s inspection method.
  • [4] Optional objective lens 10x, 20x, 50x.
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