Description
Features
- Auto zoom lens with magnification 25-209 x
- Optional auto zoom lens with magnification 25-338 x
- Programmable 6 rings 8 segments surface light and profile light, available illumination configuration to meet different applications
- Flying-snap function(optional), increasing measurement efficiency 5-10 times
- Quick-focusing function, increasing measurement efficiency
- Gantry mobile bridge structure with large travel range enables silent measurement, efficiency and safety
- Joystick is provided for easy operation
- Granite structure provides high precision and stability
- Acceleration of XY stage is 1000mm/s2
- Optional chromatic confocal sensor, contact probe, coaxial light, turntable, manual/automatic pressure plate etc.
Specification
| Model | VMG452 | VMG682 | VMG8102 | VMG10122 | VMG12162 | |
|---|---|---|---|---|---|---|
| Travel (mm)[1] | 400 x 500 x 250 | 600 x 800 x 250 | 80 x 1000 x 250 | 1000 x 1200 x 250 | 1200 x 1600 x 250 | |
| External Dimensions (mm) | 1255 x 1532 x 1747 | 1455 x 1732 x 1747 | 1715 x 2212 x 1777 | 1915 x 2412 x 17 | 2115 x 2812 x 1777 | |
| Mass (kg) | 1500 | 1900 | 2900 | 3650 | 4680 | |
| Max. Stage Loading (kg) | 80 | 60 | ||||
| Accuracy[2] (µm) | X/Y linear | E1=(2.0+L/200) | E1=(3.2+L/200) | |||
| XY area | E2=(2.2+L/200) | E2=(3.5+L/200) | ||||
| Z linear | E1=(5.0+L/200) | |||||
| E1=(2.8+L/200) (Optional 13.3:1 lens) | ||||||
| Optics | 8.3:1 continuous zooming(Optional 13.3:1 continuous zooming) | |||||
| Magnification[3] | 25-209 x | |||||
| Illumination | Profile | LED cold light, 256 brightness adjustable | ||||
| Surface | Programmable 6rings 8segments, each segment independently controlled, 256 brightness adjustable (Movable surface light is for option) | |||||
| Coaxial | Optional, LED cold light, 256 brightness adjustable | |||||
| Camera | High definition industrial color digital camera | |||||
| Drive system | 4-aixs CNC CD servo system | |||||
| Speed (mm/s) | XY | 500 | ||||
| Z | 100 | |||||
| Guide | 3-axis precise linear guide | |||||
| Scale | 0.1 µm | |||||
| The Min Unit (µm) | 0.1 | |||||
| Image Processing | Advanced TZTEK image processing method: 256 gray level, 20:1 sub-pixel processing technique | |||||
| Software | Vispec (VMG Version) | |||||
| Environment | Temperature 20°C±2°C, Humidity30-80% | |||||
| Vibration<0.002 g, below 15 Hz | ||||||
| Power | 200-240 vac, 50/60Hz, 1 phase, 700W | |||||
- [1] The measurement range of Z-axis is 210 mm, it can add to 400 mm. Customizable travel range 16202 12202
- [2] L is the measured length in mm, determined by TZTEK’s inspection method.
- [3] Magnification is approximate and depends on the size and resolution of the monitor.
- [4] Optional coaxial light. The specification is same as profile lighting
0.5x or 1.5x or 2.0x additional lens are available for option with the magnification 12-104x or 37-313x or 50-418x.
