Stable mechanical structure

• The single-sided overhead moving bridge structure reduces moving mass and brings the drive closer to the moving center of mass, which minimizes Abbe error, and effectively improves motion performance and accuracy stability.
• High-rigid high-performance air-bearing guide brings neither friction nor wear or tear, and the three axes designed in an enveloping structure together with air-bearing pressure monitor effectively ensure its stability.
• Ultra-low linear temperature and linear expansion coefficient scale for three axes is insusceptible to temperature change, effectively improving the accuracy of the machine.

Application of new materials

Key structural parts are made of high-precision silicon carbide ceramics, which provide higher rigidity and lower temperature linear expansion performance while making the moving bridge lighter in mass, greatly improving accuracy and long-term reliability.

Safety

The Z-axis is under the protection of both the pneumatic logic of the balancing cylinder and the hardware hold-up mechanism, ensuring the safety of the detection system in an emergency.